Tutorials

• 1A: Dr. Aaron Partridge, SiTime:  MEMS Oscillators: Specifications, Applications, and System Perspectives
• 2A: Prof. Ashwin Seshia, Cambridge: Analytical models for co-design of micromachined resonators and electronic circuits in MEMS oscillators
• 3A: Prof. Clark Nguyen, UC Berkeley: MEMS-Based Oscillators
• 4A: Dr. Troy Olsson, DARPA: Piezoelectric MEMS Oscillators

Track B – Frequency References and Phase Noise

• 1B: Dr. E. Rubiola, Femto-ST: The Pound-Drever-Hall frequency control, and applications
• 2B: Dr. Mike Driscoll, Consultant: We have met the enemy, and it is vibration
• 3B: Dr. Robert Lutwak, DARPA: Introduction to Atomic Clocks
• 4B: Dr. Lute Maleki, OEWaves: Photonic Oscillators

Track C – M/NEMS, BAW, SAW, Quartz Resonators

• 1C: Dr. John Vig, Consultant &  Prof. Yook-Kong Yong, Rutgers: Fundamentals, Analysis, Design and Performance of Crystal Resonators and Oscillators
• 2C: Prof. Kenja Hashimoto, Chiba U: Fundamentals of RF Acoustic Resonators and Their Characterization
• 3C: Prof. S.S. Li, NTHU: CMOS-MEMS Resonator Technology for Signal Processing and Sensing
• 4C: Prof. M. Rinaldi, North Eastern: Piezoelectric Resonant MEMS Devices for Radio Frequency Communication and Sensing Applications

Track A – MEMS Oscillators

Dr. Aaron Partridge, SiTime:  Commercial MEMS Oscillators: Specifications, Applications, and System Perspectives

Abstract: MEMS oscillators are now replacing quartz oscillators in applications from consumer through telecom, from low cost through precision, from low power 32kHz through low jitter MHz, and from single-ended CMOS through differential LVPECL. In this tutorial we will discuss the architecture and construction of commercial MEMS oscillators. We will discuss application drivers and their relationship to device requirements, including key specifications for processor clocking, serial interfaces (SONET, PCIe, SATA/SAS, 10GbE, …), RF links, IEEE 1588 synchronization, and ultra-low power timekeeping.  Finally, we will discuss what is setting MEMS apart from quartz and why customers are transitioning to it.

Biography: Aaron Partridge is Founder and Chief Scientist of SiTime Corp where he guides the technological direction. SiTime was founded in 2005 to develop MEMS-based timing references. From 2001 through 2004, Dr. Partridge was Project Manager at Robert Bosch Research and Technology Center, where he coordinated the MEMS resonator and packaging research. From 1987 through 1991 he was a founder and Chief Scientist of Atomis, Inc., a manufacturer of STM, AFM, and BEEM (Scanning Tunneling, Atomic Force, and Ballistic Emission Electron) Microscopes. He received the B.S., M.S., and Ph.D. degrees in Electrical Engineering from Stanford University in 1996, 1999 and 2003. His thesis delivered MEMS accelerometers for the NASA X-33 space plane and the first thin-film encapsulated piezoresistive accelerometers. Dr. Partridge has authored and co-authored 30 scientific papers and holds 60 patents. He serves on the IEEE International Solid-State Circuits Conference, Imagers, MEMS, Medical and Displays Subcommittee, is the Editorial Chair of the IEEE International Frequency Control Symposium, and is an Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

Prof. Ashwin Seshia, Cambridge: Analytical models for co-design of micromachined resonators and electronic circuits in MEMS oscillators
Abstract: MEMS oscillators are increasingly being commoditized for a variety of applications driven by form factor, integration and cost considerations. However, the design process still relies very substantially on numerical simulation, often conducted separately in the mechanical and circuit domains, particularly when dealing with non-linear effects and noise processes. This tutorial will introduce approaches for constructing and analyzing discrete models for MEMS oscillators, with an emphasis on the modelling of non-linearities and noise processes, aimed towards deriving physical insight in the design process. Mathematical models and experimental case studies introducing the role of engineered non-linearity in MEMS oscillators will also be discussed.

Biography: Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008. During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Dr Seshia serves on the editorial boards of the IEEE/ASME Journal of MicroElectroMechanical Systems and the IEEE Transaction of Ultrasonics, Ferroelectrics and Frequency Control.

Prof. Clark Nguyen, UC Berkeley: MEMS-Based Oscillators

Abstract: Reference oscillators based on high-Q MEMS resonators have recently become viable alternatives to traditional quartz versions for low-end timing purposes in such applications as televisions and camcorders. Higher end versions of such oscillators suitable for cell phone or other communication applications seem poised to soon hit the market. Indeed, with resonator Q’s exceeding 100,000, research oscillators have posted impressive phase noise performance, even achieving marks that meet the challenging GSM specification while consuming less than 100µW of power. While such devices offer compelling savings in power and space compared to quartz for cell phone applications, they await improvements in aging and temperature stability. In addition, further reductions in power consumption are still desired for future autonomous wireless sensor networks, where nodes would be expected to operate and communicate for long periods without the luxury of replacing their power sources. The integrated circuit nature of MEMS technology that encourages the use of multiple resonators (which often come for practically free) will likely be instrumental towards this goal.

This tutorial presents an overview of the models, circuit topologies, and overall design strategies that have yielded present-day MEMS-based oscillator products and that might propel future such oscillators for higher end applications. The focus will be on capacitive-gap transduced MEMS that presently dominates the MEMS-based timing industry. Time permitting, all aspects will be covered, from fabrication technology, including packaging; to MEMS-based resonator design and mechanical circuit modeling; to oscillator modeling and design, including design strategies to minimize noise and other short term instabilities, e.g., acceleration sensitivity; to methods for nulling drift due to temperature dependence and aging. Two examples of actual demonstrated oscillators—ones a real-time clock, another a GSM reference—will serve as vehicles to drive a practical discussion.

Biography: Prof. Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sci¬ences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is presently a Professor and a Co-Director of the Berkeley Sensor & Actuator Center. His research interests focus upon micro electromechanical systems (MEMS) and include integrated micromechanical signal processors and sensors, merged circuit/microme-chanical technologies, RF communication architectures, and integrated circuit design and technology. In 2001, Prof. Nguyen founded Discera, Inc., the first com¬pany aimed at commercializing communication products based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research in past years. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for three-and-a-half years as the Program Manager for 10 different MEMS-centric programs in the Microsystems Technology Office of DARPA. Prof. Nguyen was the Technical Program Chair of the 2010 IEEE Int. Frequency Control Symposium and a Co-General Chair of the 2011 Combined IEEE Int. Frequency Control Symposium and European Frequency and Time Forum. He is an IEEE Fellow and served as a Distinguished Lecturer for the IEEE Solid-State Circuits Society from 2007 to 2009. From 2008 to 2013, Prof. Nguyen served as the Vice President of Frequency Control for the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society and is presently the President-Elect of the society.

Dr. Troy Olsson, DARPA: Piezoelectric MEMS Oscillators

Abstract: This tutorial will review the state of the art and future directions of piezoelectric micromechanical oscillators.  The tutorial will begin by discussing different types of piezoelectric micromechanical resonators, such as film bulk acoustic resonators (FBARS), contour mode acoustic resonators, thin-piezoelectric-on-silicon (TPOS) resonators and micromachined quartz resonators.  Particular emphasis will be paid to how the characteristics of these different resonators, such as quality factor, power handling, coupling coefficient, thermal drift and vibration stability, impact oscillator performance.  Next, examples of piezoelectric MEMS oscillators will be reviewed.  Finally, a look towards the future of piezoelectric MEMS oscillators will be discussed.

Biography: Dr. (Troy) Roy H. Olsson III joined DARPA as a program manager in June 2014.  His research interests include materials, devices and architectures that enable low power processing of wireless and sensor signals, adaptive radio frequency (RF) systems, and phased array antennas.
Dr. Olsson is currently serving DARPA while on leave as a Principal Electronics Engineer in the MEMS Technologies Department at Sandia National Laboratories in Albuquerque, NM.  At Sandia, Dr. Olsson led research programs in the area of piezoelectric micro-devices realized in thin films of aluminum nitride (AlN) and lithium niobate (LiNbO3) for processing of RF, inertial and optical signals.  Together with the Sandia Microresonator Research Team, he was awarded an R&D100 award in 2011 for his work on Microresonator Filters and Frequency References.

Dr. Olsson has received numerous technical awards, has authored more than 90 technical journal and conference papers and holds 16 patents in the area of microelectronics and microelectromechanical systems (MEMS).

Dr. Olsson received B.S. degrees in electrical engineering and in computer engineering from West Virginia University and the MS and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor.  His graduate research was in the area of implantable, low power, mixed signal integrated circuits for interfacing with the nervous system.

Track B – Frequency References and Phase Noise

Dr. E. Rubiola, Femto-ST: The Pound-Drever-Hall frequency control, and applications

Abstract: The PDH frequency control is a milestone in radio engineering, spectroscopy and optics, and a smart and powerful tool available to numerous branches of experimental science. First published by Robert V. Pound (one of the Radiation Laboratory golden team) in 1946, the `Pound control' served to stabilize a X-band reex klystron to a high-Q cavity. This control was ported to the HF band by Peter G. Sulzer, who designed the first all-transistorized quartz oscillator (2.5 and 5 MHz) in 1955, ans then to optics by Ronald W. P. Drever and John L. Hall (Nobel prize in 2005). The PDH control is nowadays the standard method to control a microwave oscillator to a reference resonator; or to control a laser to an external Fabry-Perot etalon, or to more exotic optical resonators.
The PDH scheme exhibits some unique features, which makes it superior to any other known option: The path length from the locked oscillator to the reference resonator cancels, so its fluctuations. Locking relies on a null measurement of the frequency error. Thanks to AC phase modulation, the detection electronics gets out of the flicker and drift region.
Most used in general microwaves and optics, this technique is the one and only option for applications requiring extreme frequency stability (10-15 and beyond), and also when the resonator is separated from the resonator.
Applications span in a wide range: flywheel for atomic clocks, either microwave or optical, general metrology and optics, spectroscopy, detection of gravitation waves, space and military electronics, etc.The first part of the tutorial provides an overview on the method, and explains how to get the error signal, how to control the oscillator or the laser to the reference, and how to obtain the relevant features. The second part reviews selected applications.

Biography: Enrico Rubiola is full professor at the Université de Franche Comté and deputy director of the Department of Time and Frequency of the CNRS FEMTO-ST Institute, Besançon, France.  Formerly, he was a full professor at the Université Henri Poincaré, Nancy, France, a guest scientist at the NASA JPL, a professor at the Università di Parma, Italy, and an assistant professor at the Politecnico di Torino, Italy.
     He graduated in electronic engineering at the Politecnico di Torino in 1983, received a Ph.D. in Metrology from the Italian Minister of University and Research, Roma (1989), and a Sc.D. degree from the Université de Franche Comté in 1999.
     Prof. Rubiola has worked on various topics of electronics and metrology, navigation systems, time/frequency comparisons, and frequency standards.  His main fields of interest are precision electronics form dc to microwaves and phase noise metrology, which include analog and digital frequency synthesis, high spectral purity oscillators, photonic systems, sophisticated instrumentation, and noise.  He has developed innovative instruments for AM/PM noise measurement with ultimate sensitivity, and a variety of signal-processing methods.  Currently, he is the PI of Oscillator IMP, a platform under development, dedicated to the measurement of AM/PM noise and short-term frequency stability.
    A wealth of articles, reports and conference presentations are available on the Enrico Rubiola's home page http://rubiola.org.

Dr. Mike Driscoll, Consultant: We have met the enemy, and it is vibration

Abstract: This, two-part, two-hour Tutorial will focus on vibration-induced phase noise in oscillator and non-oscillator components.  Part I will cover the analytical aspects of the subject.  Part II will deal with measurement methods and troubleshooting techniques.  At the conclusion of the Tutorial, attendees should be able to:

1. Identify the sources of vibration-induced phase noise in components and circuit assemblies.
2. Translate between the different methods of specifying vibration sensitivity and allowable levels of vibration in components and electronic assemblies.
3. Be aware of the various techniques for reducing vibration sensitivity and the proper use of those techniques, including mechanical isolator design and specification.
4. Become familiar with measurement methods and troubleshooting techniques.

Biography: Mike Driscoll joined the Westinghouse Defense Centre (now part of Northrop Grumman Electronic Systems) in Baltimore in 1965 after graduating from the University of Massachusetts in Amherst.  Since 1968, he has worked primarily on the design and development of low noise signal generation hardware for use in high performance radar systems and other special applications.  He was a Senior Consulting Engineer and subsequently a contract engineer at Northrop Grumman until retiring in December, 2012.  His responsibilities included the design and development of high stability oscillators as well as characterization and reduction of phase noise in RF signal processing components and circuits.  He is a past Secretary, Treasurer, and President of the Baltimore, Washington, and Northern Virginia chapter of the UFFC.  He has been a member of the IEEE Frequency Control Symposium Technical Program Committee since 1987.  He is an Associate Editor and Associate Editor-in-Chief of the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control (UFFC) and was the Conference Chair for the 2005, 2006, and 2012 IEEE International Frequency Control Symposia (IFCS).  In 1991, he was elected an IEEE Fellow, cited for "Contributions to the development of low-noise acoustic resonator-stabilized oscillators". In 1997, he was the recipient of the IEEE UFFC Society CADY award, cited for Contributions to Low Noise Signal Generator Design.  In 2006, he was a recipient of the Northrop Grumman Lifetime Achievement Award and, in 2013, the IEEE UFFC Society’s Distinguished Service Award.  He was the UFFC Society’s Distinguished Lecturer for 2012-2013.  He has published and presented over 60 papers in IEEE Journals and at IEEE Conferences.  He has presented several IEEE Tutorials and Northrop Grumman Instructional Courses and holds 16 U.S. Patents dealing with the subject of Low Noise Signal Generation.  He is currently a consultant.

Dr. Robert Lutwak, DARPA: Introduction to Atomic Clocks

Abstract:  The fundamental precision of atomic timekeeping is unequaled in any other measurement methodology. Atomic frequency standards provide the ultimate source of accuracy and stability for all modern communications, navigation, and time-keeping systems. State-of-the-art atomic clocks test the frontiers of theoretical and experimental information theory, atomic physics, and cosmology. Practical implementations of atomic clocks range from commodity rubidium oscillators, smaller than a sandwich and accurate to parts in 10^11, to one-of-a-kind laboratory-scale optical clocks, manned by teams of scientists and achieving accuracies now measured in parts in 10^18.

This tutorial will provide an introduction to atomic frequency standard technology, with particular emphasis on the general scaling rules, atomic physics and engineering challenges common to all implementations in the field.

The tutorial will focus on mature technologies: rubidium oscillators, cesium beam frequency standards, and hydrogen masers. Time permitting we will also introduce emerging technologies, the application of laser sources to atomic interrogation, coherent population trapping and chip-scale atomic clocks, cold atom clocks and fountains, and optical clocks.
Biography: Robert Lutwak is a Program Manager in the DARPA Microsystems Technology Office. Prior to joining DARPA MTO in September, 2013, Dr. Lutwak served as Chief Scientist at Symmetricom's Technology Realization Center in Beverly, MA. In his fifteen years at Symmetricom, Dr. Lutwak's responsibilities included support of manufacturing and conventional atomic clock technology as well as research and development of next-generation clocks for deployment in commercial, military, and aerospace applications. From 2001-2010, Dr. Lutwak served as Principal Investigator on the DARPA/MTO-sponsored chip-scale atomic clock (CSAC) program, which led to Symmetricom's 2011 release of the world's first commercially available CSAC. Dr. Lutwak received his B.S. degree in physics from Miami University in 1987 and his Ph.D. in atomic and optical physics from the Massachusetts Institute of Technology in 1997.
Dr Lutwak is a Senior Member of the IEEE and has served on the IFCS Technical Program Committee since 2001.

Dr. Lute Maleki, OEWaves: Photonic Oscillators

Abstract: Spectrally pure and stable microwave and mm-wave reference signals have widespread applications in high rate data processing, communications, and radar systems. The emerging technology of RF photonics directly meets the challenge of providing high spectral purity for emerging applications, beyond what is possible with traditional electronics approaches. In this tutorial the basis of optical oscillators will be presented, followed by examples of various architectures and latest developments for generation of fixed and tunable frequency oscillators. Future prospects of this powerful technology will also be discussed.

Biography: Lute Maleki is a Founder and President and CEO of OEwaves, Inc. Previously he was at JPL and created and led the Quantum Sciences and Technologies Group. Dr. Maleki’s previous and current research include study and development of ultra-stable photonic oscillators; whispering gallery mode optical microresonators; atomic clocks based on ion traps and laser cooled atoms; quantum sensors. He has over 50 U.S. Patents, authored 150 refereed publications, serve on technical program committees, is a Fellow of the IEEE, a Fellow of APS, and a Fellow of the Optical Society of America.  He received the IEEE Rabi Award, NASA’s Exceptional Engineering Achievement Medal, and IEEE UFFC Sawyer Award.

Track C – M/NEMS, BAW, SAW, Quartz Resonators

Dr. John Vig, Consultant &  Prof. Yook-Kong Yong, Rutgers: Fundamentals, Analysis, Design and Performance of Crystal Resonators and Oscillators

Abstract: This short course is divided into two parts of one-hour each:
Part I: Fundamentals and Performance of Crystal Resonators and Oscillators, John R. Vig1
The fundamentals of crystal resonators and oscillators will be reviewed.  Emphasis will be on those aspects that are of greatest interest to users (as opposed to designers).  The discussion will include: (1) crystal resonator and oscillator basics; (2) the characteristics and limitations of temperature compensated crystal oscillators (TCXOs) and oven controlled crystal oscillators (OCXOs); (3) oscillator instabilities:  aging; noise; and the effects on frequency stability of:  temperature, acceleration, radiation, warm-up, pressure, magnetic field, and the oscillator circuitry; and (4) guidelines for oscillator comparison, selection and specification.
Part II: Analysis and Design of Quartz MEMS Resonators, Yook-Kong Yong2
Review of the finite element method for analysis and design of quartz MEMS resonators such as tuning forks and thickness shear resonators.  Discussions on the accuracy of resonant frequency, and frequency spectrum for design purposes. Effects of the resonator and electrode geometry and mounting support structure on the quality factor (Q), and electrical parameters R1, L1, C1, and C0. If time permits, frequency-temperature analysis and design of AT-cut MEMS resonators.
 

Biographies:
John Vig was born in Hungary. He emigrated to the United States in 1957, where he subsequently received the B.S. degree from the City College of New York and his Ph.D. degree from Rutgers - The State University. He spent his professional career performing and leading R&D in US government research laboratories - developing high stability quartz crystal resonators, oscillators, and sensors.
He has been awarded 55 patents and is the author of more than 100 publications, including nine book chapters. Since 2006, he has been a consultant, mainly to program managers at the US Defense Advanced Research Projects Agency (DARPA) for programs ranging from micro- and nanoresonators to chip-scale atomic clocks. He is an IEEE Life Fellow, and is the recipient of the IEEE Cady Award and the IEEE Sawyer Award. He has been the Distinguished Lecturer of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control (UFFC) Society, and he has served as the president of this Society. He founded the IEEE Sensors Council, served as its founding president, and he served as the 2009 IEEE President and CEO.
He and his wife live in Colts Neck, NJ, USA.  Their main hobby is ballroom dancing.
Yook-Kong Yong is professor at Rutgers University, Dept. of Civil and Environmental Engineering, New Jersey, U.S.A. He received the B.S. degree in civil engineering (1979) from Lafayette College, Pennsylvannia, U.S.A., the M.A.(1981) and Ph.D.(1984) degrees in structures/mechanics from Princeton University, New Jersey, U.S.A.
He is a registered Professional Engineer in New Jersey. He serves as an associate editor for the journal IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. He is a member of the IEEE and ASCE societies. At the IEEE Society, he serves as the chair of Technical Program Committee for the IEEE Ultrasonics Symposium 2011, and as a member of the Technical Program Committee for the IEEE Ultrasonics Symposia, and IEEE Frequency Control Symposia in the years 1989 to present.
His research interests are in the numerical modeling of bulk acoustic wave and surface acoustic wave piezoelectric resonators and filters; their frequency-temperature behavior, acceleration sensitivity, noise characteristics and thermal stress behavior. He has also practiced as a consultant to the industry. He has been awarded 9 patents. He has authored more than 130 journal and proceeding publications, and presented more than 90 technical papers in symposia.

Prof. Kenja Hashimoto, Chiba U: Fundamentals of RF Acoustic Resonators and Their Characterization
                                                                       
Abstract: When RF acoustic resonators are designed and fabricated, measured results are usually worse than the simulation. What shall we do for the next trial? In my experience, careful investigation of measured results is the best way for finding hidden troublemakers. But you may ask me "how?"
This tutorial starts from the basics of RF acoustic resonators. Then mechanisms which degrade resonator performances are discussed, and it is shown how they appear in the electrical characteristics. Finally, characterization of RF resonators is demonstrated for several examples.

Biography: Ken-ya Hashimoto received his B.S. and M.S. degrees in electrical engineering in 1978 and 1980, respectively, from Chiba University, Chiba, Japan, and a Dr. Eng. degree in 1989 from Tokyo Institute of Technology, Tokyo, Japan. In 1980, he joined Chiba University as a research associate, and is now a professor at the university. His current research includes various types of surface and bulk acoustic wave devices, acoustic wave sensors, and application of thin film micromachining technologies to the acoustic wave devices.

Prof. S.S. Li, NTHU: CMOS-MEMS Resonator Technology for Signal Processing and Sensing

Abstract: This tutorial provides the fundamentals and recent progress of the high-Q integrated micromechanical resonators, oscillators, filters, and acoustic sensors using the “CMOS-MEMS technology” to enable monolithic integration of MEMS and IC for frequency control and sensing applications. The content covers four major parts, including (i) the fabrication technologies of the CMOS-MEMS resonators/sensors and their associated interface circuitry; (ii) the performance enhancement of the resonators on motional impedance, quality factor, power handling, thermal stability, frequency tuning, and parasitic feedthrough; (iii) the implementation of the CMOS-MEMS resonators for frequency generation (i.e., oscillators), frequency selection (i.e., filters), and resonant sensing functionalities; and (iv) the transduction mechanisms other than purely capacitive transducers, such as capacitive-drive / piezoresistive sense and thermal drive / piezoresistive sense versions, implemented in CMOS-MEMS resonators. In the first part, various fabrication technologies in the 0.35m and 0.18m CMOS technology nodes will be presented, showing their own features and advantages. In the second part, several strategies in design aspects and material points of view will be described in order to enhance the performance of the CMOS-MEMS resonators. In the third part, designs and experimental results of the CMOS-MEMS oscillators, filters, and sensors will be presented. In the last part, different transductions used in CMOS-MEMS resonators will be covered mainly targeted for sensor applications. We take full advantage of the IC and semiconductor strength in Taiwan to develop several CMOS-MEMS resonator platforms towards single-chip implementation for timing reference, oscillator, filter, and sensor applications.

Biography: Sheng-Shian Li received the B.S. and M.S. degrees in mechanical engineering from the National Taiwan University, Taipei, Taiwan, in 1996 and 1998, respectively, and the M.S. and Ph.D. degrees from the University of Michigan, Ann Arbor, MI, USA, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, where he is currently an Associate Professor. His research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, front-end communication architectures, and integrated circuit design and technology. Dr. Li was a recipient of the Young Faculty Research Award from the National Tsing Hua University in 2013. In the same year, Dr. Li also received the Ta-Yu Wu Memorial Award from the Ministry of Science and Technology of Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He also served as the TPC of the IEEE International Frequency Control Symposium (IFCS) and the IEEE Sensors Conference. He served as the local organizing committee chair for the 2014 IEEE IFCS.

Prof. M. Rinaldi, North Eastern: Piezoelectric Resonant MEMS Devices for Radio Frequency Communication and Sensing Applications

Abstract: Piezoelectric resonant MEMS devices have shown significant potential for radio frequency (RF) communication and sensing applications. This is due to their excellent features such as small size, wide range of operating frequencies (from few MHz to several GHz), high transduction efficiency and high quality factor (Q).
This tutorial covers the basic concepts needed to understand the working principle, design, fabrication and testing of piezoelectric resonant MEMS devices including material properties, fabrication technologies, structural mechanics, piezoelectric sensing and actuation principles, lumped modeling for mechanical vibration and testing techniques.
Furthermore, key applications and ongoing challenges of piezoelectric MEMS resonant devices are identified and discussed through a state of the art review and case studies of several classes of devices including sensors and RF components.

Biography: Matteo Rinaldi received his Ph.D. degree in Electrical and Systems Engineering from the University of Pennsylvania, Philadelphia, in 2010. He joined the Electrical and Computer Engineering department at Northeastern University as an Assistant Professor in January 2012.
Dr. Rinaldi’s research focuses on understanding and exploiting the fundamental properties of micro/nanomechanical structures and advanced nanomaterials to engineer new classes of micro and nanoelectromechanical systems (M/NEMS) with unique and enabling features applied to the areas of chemical, physical and biological sensing and low power reconfigurable radio communication systems. He has authored more than 50 publications in the aforementioned research areas and also holds 7 device patent applications in the field of micro/nano mechanical resonant devices.
Dr. Rinaldi was the recipient of the NSF CAREER award in 2014 and the DARPA Young Faculty award class of 2012. He received the Best Student Paper Award at the 2009 and 2011 IEEE International Frequency Control Symposiums.
Dr. Rinaldi is an elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC) Administrative Committee (AdCom).